T(K) cross section uncertainty (2 sigma) at 193 nm 298 2.0e-21 5.0e-22 473 2.1e-21 4.0e-22 573 2.4e-21 2.0e-22 673 2.8e-21 3.0e-22 773 4.1e-21 4.0e-22 873 6.6e-21 9.0e-22 973 9.5e-21 1.1e-21 1073 1.4e-20 2.0e-21